Your position :Home > Product Category
Bonded Silicon Target

Purity: Si 5N min.

Silicon targets are mainly used to reflect the preparation of SiO2 and SiN films by magnetron sputtering. As important functional films, they have good hardness, optical and dielectric properties, wear resistance and corrosion resistance. It has a broad application in LCD transparent conductive glass, building low-e glass and microelectronics industry.

Conductivity Types Crystal Orientation Surface Roughness Shapes
N type(P doped) & P type(B doped) 100 or 111 Ra 1.6 μm max. Planar & Rotary

Processing Method CZ(Czochralski), casting and spraying
Backing Plate Copper or SS
Resistivity 0.005~0.02 Ω·cm, 1~10 Ω·cm & 10 Ω·cm min
Thermal Conductivity 149Wm-1K-1
Availabe  Specification(max.) Sheet L: 320mm,W: 100mm, T: 10mm
Tube T:6/8/10mm, L: 900mm
Disc D 300mm